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Secondary Ion Mass Spectrometer (SIMS)

MANUFACTURER Hiden Analytical
MODEL Manufacturer custom assembly of different parts
TRAINING Although training is required to use this item, we cannot arrange it for you.
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SITE City Campus West


The system utilises UHV (Ultra High Vacuum) chamber with a loadlock system to efficiently load and unload samples. The 5keV ion gun present in the unit is an IG20 gas ion type which can use argon or oxygen. The detector installed uses a quadrupole system with an atomic mass range capability of 1-1000 amu. The system is able to provide the following characterisation: Mass spectrum, Chemical Mapping and depth profiling. The maximum size for the sample is about 1 cm2.


Sample max size: 1cm2. Ion gun energy: 5keV Atomic mass range: 1-1000 amu Type of ion capabilities: Argon and Oxygen

Item ID #394.

Last Updated: 30th October, 2015