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Scanning Electron Microscope (SEM)/EDS-WDS combined system

MANUFACTURER FEI/Oxford University
MODEL Quanta 200 electron microscope combined with the Inca X sight and analyser system
TRAINING Training is required to use this item and we can arrange this if needed.
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SITE City Campus West


The Quanta 200 SEM accommodates a widest range of specimens of any SEM, making it the perfect research partner for labs that process a variety of samples or need to characterize specimens that would be challenging for most conventional SEMs. Quanta features three operating modes — high vacuum, low vacuum and environmental SEM (ESEM) —to allow characterization of samples in their natural states, without the need for coatings or other preparation, giving you a picture of the true structure and composition. The platform offers configurations for samples large and small, with a large range of analytical attachment. The system is equipped with external analytical systems from Oxford instruments (INCA X-sight and analyser), such as energy dispersive spectrometer, wavelength dispersive x-ray spectroscopy and electron backscatter diffraction.


Resolution • High-vacuum

• Low-vacuum

• Extended vacuum mode (ESEM)

• Accelerating voltage: 200V – 30kV • Probe current: up to 2?A – continuously adjustable. Detectors • Everhardt-Thornley SED • Low-vacuum SED (LFD) • Gaseous SED (GSED) • IR-CCD • Solid-state BSED • Gaseous analytical BSED (GAD)* Chamber • 284mm left to right • 10mm analytical WD • 8 ports • EDX take-off angle: 35° Max sample size: 5x5 cm2 The analytical system for the compositional analysis: Oxford Instruments INCA X-sight LN2 EDS (Energy Dispersive Spectroscopy) X-ray detector: Si(Li) detector, 10mm ATW2, specified energy resolution at 5.9 keV: 133eV

Item ID #393.

Last Updated: 30th October, 2015